福州卓凱電子科技有限公司

該部件主要用于工藝腔室內(nèi)部的等離子體屏蔽與氣體流場(chǎng)控制，起到防止顆粒污染、維持制程穩(wěn)定性和保護(hù)腔體結(jié)構(gòu)的作用，對(duì)材料純度、尺寸精度和耐高溫腐蝕性能有極高要求。

?部件編號(hào)?：2L05-350735-V1（常見(jiàn)版本）

?部件名稱?：RING COVER V2E-SMZP

?制造商?：Tokyo Electron Limited（TEL）

?應(yīng)用設(shè)備?：TEL 2L05系列刻蝕機(jī)或類似前道工藝平臺(tái)

?功能作用?：

作為腔室內(nèi)的環(huán)形遮蔽蓋板，參與等離子體分布調(diào)控；

防止工藝過(guò)程中副產(chǎn)物沉積到敏感區(qū)域；

提升工藝重復(fù)性與晶圓表面潔凈度，保障芯片良率

以下鏈接皆有貨

BE25A20ACG / BLESS PWM SERVO AMPLIFIER / ADVANCED MOTION CONTROLS

BE34K-NPSN / PARKER BLES SERVO MOTOR, 14082N0012 / PARKER

BES 4326 / BAY 8 PORT PNEUMATICS PCB W/ OVERRIDE / BAY TECHNOLOGIES / KLA 2132

BES-4235 / BAY PNEUMATIC ASSY SVG 90S PNEUMATIC PCB 114-059 / SVG

BFA-02-100-ST-02-WLF / BREAK FILTER / TOKYO ELECTRON TEL

BFLY-PGE-13S2M-CS/CAMERA DCU ASSY NON TARGET ASH 5K80-POINT GREY

BG3-3014 / BG8-3552 BH8-1970-01 M POS5 PCB / CANON

BG3-3357 / BH8-2344 BG83559 URS CD PCB / CANON

BG3-3521 / FZANA IF PCB BH8-2091-03 / CANON

BG4-/ SHUTTER UNIT / CANON

BG4-2035 / IPIF-III / CANON

BG4-2102 / CANON TTL AF CPU BH8-1059-01 BG4-2102 BG8-2373 / CANON USA INC

BG4-2420 / CANON I3 COM RL PCB BG8-2356 BH8-1192-01 / CANON USA INC

BG4-3089 / RC-2PCB, BH8-0595-02 / CANON

BG4-3669 / WITH BG8-2456 PCB SHUTTER ConTROL WITH CABLES EXCHANGE / CANON

BG4-3811 / CANON I3 DISK-UNIT-II BH8-1394-02 / CANON

BG4-3835 / PCB CANON CPU20-III BH8-1395-02 / CANON

BG4-4078 / CANON CPU-86 BH8-0675-03 AF CPU / CANON

BG4-4649 / Canon I3 P-CON PCB BH8-1541-02 / CANON USA INC

BG4-5164 / PA-USM,LASER ROTARY ENCODER ASSY CANON I3 FEED HAND 81000 P-R /CANON

BG4-5975-R00 / I1/I3 EXPOSURE MERCURY LAMP POWER SUPPLY USHIO SB-15202AP / CANON

BG4610A-540H/CU46AES / BALL SCREW ACTUATOR PARALLEL MOUNTING / MIT

BG4-6511 / CANON I3 3RD ConDENSER LENS / CANON

BG4-6512 / CANON I 3 COLLIMATOR LENS FROM PE3 STEPPER / CANON

BG4-6628 / PCB, CAM FOR CANON I4 OR I5 W/EXCHANGE / CANON

BG4-6712 / CANON I3 FT1 2ND ConDENSER LENS / CANON

BG4-6733 / CANON 3000 RETICLE CASSETTE LIBRARY / CANON

BG4-6738 / RETICLE CASSETTE ROBOT / CANON

BG4-6746 / CANON WF/RC-IF BG8-2683 / CANON

BG4-6789 / BH8-1818-01 PCB BOARD / CANON

BG4-6974 / CANON E-CD PCB / CANON

BG4-G713 / CANON I3 FT2 2ND ConDENSER LENS ASSEMBLY / CANON

BG5-/ ROBOT ASSY, SCH THETA, 300MM / CANON

BG60CB13BAABN / AC SERVO MOTOR 60W 3000RPM 1000PPR / OLYMPUS OPTICAL CO

BG65X50CI / 188962,ASM DEK BOM MOTOR DRIVE PRINT CARRIAGE / DUNKERMOTOREN

BG8-2673 / PCB BOARD, BG4-8192, BG8-1766-01 / CANON

BG9-1884 / PCB, PANEL DRIVE, BH8-0257-02 , W/EXCHANGE / CANON

BG9-2160 / BHCANON I3 RC IF / CANON

BG9-3345 / I3 PREALIGNER CCD PCB ASSY (RC-CCD-20P) (BH8-0646-01) / CANON

BG9-3500 / CANON BH8-0670-05 ADP-II PCB ASSY / CANON

BG9-3502 / BH8-0672-03 ACC-1 STEPPER BOARD / CANON

BG9-3715 / BH8-0680-02 CANON TILT-WZ I/F BOARD / CANON

BG9-3718 / CANON XYSTG-IF PCB BH8-0681-01 / CANON

BG9-3719 / BH8-0682-02 IMF-IF CANON PCB / CANON

BG9-3727 / CANON CPU-86 BH8-0675-03 BG9-3727 X Y CPU PCB / CANON

BG9-3730 / CANON RC CPU PCB CPU-86 BH8-0675-03 BG9-3730 / CANON

BG9-3769 / CANON I3 BH8-0766-01 PZ DRIVE PCB / CANON

BG9-/ PCB / CANON

BGC-024407 / PCB, FM MODULE 1G / ADVANTEST

BGD-022462 / SD-BOARD / ADVANTEST

BGD-026363 / PCB , MDC, PMD / ADVANTEST

BGF-020093 / PCB, MEMORY MODULE, ADVANTEST T5365P / ADVANTEST

BGF-022575 / PCB, FBM MODULE, T5365P / ADVANTEST

BGH-018825 / T5365P TEST HEAD BOARD / ADVANTEST

BGH-018829 / T5365P TEST HEAD BOARD / ADVANTEST

BGH-018830 / T5365P TEST HEAD BOARD / ADVANTEST

BGH-019207 / T5365P TEST HEAD BOARD / ADVANTEST

BGK-022545 / EM BOARD, PGK-822545AA1, A9728B-ACB2 / ADVANTEST

BGK-022921 / PCB, A9811B-ABA, J8 TBUS IN, J7 TBUS OUT / ADVANTEST

BGK-023082 / PCB J5 CHBUS / ADVANTEST

BGL-018817 / PE CARD T5365P / ADVANTEST

BGL-018818 / PCB, ADVANTEST OP PE BOARD T5365P / ADVANTEST

BGL-18831 / T5365P TEST HEAD BOARD / ADVANTEST

BGM-021557 / PCB, CALIBRATION AND SIGNAL (H,P) (T5581H) / ADVANTEST

BGM46563-F /UNAXIS MICROWAVE IGNITION UNIT MIU 101 WATER MAX 230V 50-6 /OERLIKON

BGO-022241X06 / PCB / ADVANTEST

BGO-022241X07 / PCB R/ ADVANTEST

BG / AFG AFD PC / ADVANTEST

BGR-010445 / PCB, ADDR BUFFER, TFTADC0180 / ADVANTEST

BGR-011209 / PCB, FCDC 40-EDGES / 8912 / MR09086 / ADVANTEST

BGR-014059 / PCB ASSY / ADVANTEST

BGR-015467X02 / BOARD, STRBCONT, 01298588, X9626B-APB9 / ADVANTEST

BGR-016793 / IFL BOARD / ADVANTEST

BGR-016794 / DPU I/F ANALOG PCB / ADVANTEST

BGR-017418 / HV-PPS PCB / ADVANTEST

BGR-018822 / BOARD, VIO IFA (T5365) / ADVANTEST

BGR-019267 / ADVANTEST PCB ASSY T5335P, T594017 C 08 / ADVANTEST

BGR-019486 / BOARD,DC (H) / ADVANTEST

BGR-019522 / PCB UDC T6671 / ADVANTEST

BGR-019523 / DPU I-FA, PGR-B19523AA1, A9811B-ADA / ADVANTEST

BGR-019526 / MDC BAORD, PGR-A19526AA1 / ADVANTEST

BGR-021614 / BOARD,SC (H) / ADVANTEST

BGR-021800 / PROGRAM DATA SELECTION PCB (H,P) A1913B-BCB4 / ADVANTEST

BGR-021938 / BOARD, TGFC I/F (H,P) PGR-C21938CC3 / T5581H / ADVANTEST

BGR-021964 / PCB 10V PPS ConTROL / ADVANTEST

BGR-022365 / PCB, PPS (0.8A 16 CHANNEL BOARD) BGR-011365 / ADVANTEST

BGR-022911 / ADVANTEST PCB BOARD, PGR-822911AA1 / ADVANTEST

BGR-023351 / MATCH BOARD / ADVANTEST

BGR-023715X02 / PLC DPS A1949B BDA / ADVANTEST

BGR-024252X02 / PCB, PE, I/O / ADVANTEST

BGR-024351 / CALSIG PCB / ADVANTEST

BGR-024352 / DC MUX PCB / ADVANTEST

BGR-024357 / PDS, PCB / ADVANTEST

BGR-024404 / FM CNTL PCB / ADVANTEST

BGR-024443 / PCB SUBCLOCK GENERATION PGR-G/ ADVANTEST

BGR-026815X02 / ADVANTEST PCB / ADVANTEST

BGR-026905 / PCB BOARD T5771ES W/ BGC-026352 DAUGHTER B0ARDS / ADVANTEST

BGR-026905X02 / ADVANTEST PCB ASSY, DAUGHTER BOARDS BGC-026352 / ADVANTEST

BGR-026907 / ADVANTEST PCB, TEST BOARD FOR ADVANTEST T5771ES / ADVANTEST

BGR-027602 / TH, DIST, PCB / ADVANTEST

BGR-OB3617 / PCB ASSY / ADVANTEST

BGS-026864 / ADVANTEST TESTING PCB ASSY, YKH3-0572 / ADVANTEST

BGW-021450 / IFU BACKPLANE / ADVANTEST

BGX-022879 / BACKPLANE KH3-2399 / ADVANTEST

BH02301-A11-HBE / BLESS DC MOTOR 220T/ ALLIED MOTION

BH02301-AF08-HBEE / MOTOR, FOUP DOOR ELEVATOR SEMITOOL T61105 / EMOTEQ CORP

BH5-3273 / DC POWER UNIT / FUJITSU DENSO LTD

BH8-0859-01 / BG9-4087, BG8-3009 / CANON

BH8-1133-01/ PCB MV-DRIVE BG9-4944 / CANON

BH8-1300-01 / BG4-2766 CCD OPTF CAP / CANON

BH8-1361-01 / MOTHERBOARD W/ BH8-1308-01 / CANON

BH8-1817-01 / PCB BOARD, SCH-EL-PCB, BG8-2681, BG4-6794 / CANON

BH8-1829-02 / PCB CAM UNIT ASSY, BG4-6638, BG4-6628, PRO DRIVE LPS / CANON

BH8-1938-01 / CD80-CD2 PCB ASSEMBLY, BG4-8182, BG8-2694, PCB BOARD / CANON

BH8-2267-01 / BG5-1869 CAM-PCB / CANON

BH8-2317-01 /PCB CANON BG3-3122, STG-BB-EX5-PCB, BH8-2317-01 /CANON

BHK-A-V-0 / BUSCH PUMP ConTROL / BUSCH

BHM6180M-G / AC MAGNETIC BRAKE SPEED ConTROL MOTOR W/ GEAR HEAD / ORIENTAL MOTOR

BHN130023 / HOT N2 ConTROLLER / EDWARDS

BIL-014292 / PCB ASSEMBLY / ADVANTEST

BI / ADVANTEST DIST. BOARD, PL, A9537B-BBA / ADVANTEST

BI / PDS BOARD / ADVANTEST

BI / PCB BOARD, PI, A972B-ACB3 / ADVANTEST

BIR-014284 / PCB AG FC CARD PIR-E142B4BB F805B-BEB3 / ADVANTEST

BIR-019514/ PCB DFM CONTROL/ ADVANTEST

BIR-019515 / PCB ASSY / ADVANTEST

BIR-021587 / TG SUB PCB A9702B-BGA / ADVANTEST

BIR-021588 / BOARD,TG CORE(H,P) / ADVANTEST

BIR-021718 / BOARD,TG DIST(H,P) / ADVANTEST

BIR-021764 / BOARD PG CONT (HP) / ADVANTEST

BIR-022721 / PDS link, SLOT 1 / ADVANTEST